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广发证券-机械设备行业深度分析-检测量测设备：芯片良率守护者，短板突破正当时-230221

检测量测设备为半导体质量控制的重要组成部分。芯片制造过程中会产生各种缺陷，质量控制设备把关整体良率，其贯穿于芯片制造全程,包括测试和过程工艺控制两大类型，后者根据功能可具体分为检测（Inspection）和量测设备（Metrology）。检测量测设备种类丰富，光学检测为主流技术路径。检测量测可以细分为晶圆检测、掩膜版检测、关键尺寸量测、膜厚量测、晶圆形貌量测等多种细分设备，技术路线可分为光学、电

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